%0 Journal Article
%T Microfabrication Methods for Electrostatic Fluid Accelerators
%A Hsu, NE
%A Jewell-Larsen, IA
%A Krichtafovitch, IA
%A Mamishev, AV
%J Journal of MEMES
%V 18
%N 1
%P 111-118
%D 2009