@article{hsu2009microfabrication,
  title={Microfabrication Methods for Electrostatic Fluid Accelerators},
  author={Hsu, N. E. Jewell-Larsen, I. A. Krichtafovitch, A. V. Mamishev},
  journal={Journal of MEMS},
  volume = {18},
  number={1},
  pages={111--118},
  year={2009}
}